Product Features

• FOUP ID reading

• Automatic measurement of FOUP & FOSB dimensions

• Support mapping function

• Support SEMI E84&SECS/GEM communication.

• Automatic saving and uploading of measurement data

• Configuration of CCTV system to monitor the operation status of equipment at all times

• Alarm function

• Configure safety grating to ensure personnel safety

• Login personnel rights management function

• Recipe can be created freely