En 
Stocker
Product Features
Customizable storage products (RSP, POD, FOUP) and number of storage locations
Auto-sensing & reading
MES commands or local terminal operation
Visual location recognition & alignment
XCDA/N2 purge optional
| Serial No. | Storage Products | Stock Type |
| 1 | RSP | Rotating Tower / Array |
| 2 | POD | Array / Cross-layer |
| 3 | Box | Array |
| 4 | Mask Case | Rotating Tower |
| 5 | FOUP | Array |
Related product
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